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《Standard for the Protection of Semiconductor Fabrication Facilities》（NFPA318-2022）【美国消防协会标准】【附完整PDF版下载】
简介：美国消防协会标准 NFPA318-2022（英文版）
This
standard presents requirements to safeguard facilities containing
cleanrooms from fire and related hazards to protect against injury, loss
of life, and property damage. It applies to semiconductor fabrication
facilities and comparable fabrication processes, including research and
development areas in which hazardous chemicals are used, stored, and
handled and containing a cleanroom, or clean zone, or both.
Improve
chemical safety and emergency response using the 2022 edition of NFPA
318, Standard for the Protection of Semiconductor Fabrication
Facilities.
The semiconductor industry continues to advance and
new safeguards are required to address the ever-evolving hazards. NFPA
318, Standard for the Protection of Semiconductor Fabrication
Facilities, applies to semiconductor fabrication facilities and
comparable fabrication processes, including research and development
(R&D) areas in which hazardous chemicals are used, stored, and
handled and areas containing a cleanroom or clean zone.
The
chapters in this standard address every aspect of safety, from general
precautions and fire protection to construction, chemical storage and
handling, hazardous gas cylinder storage and distribution, bulk silane
systems, production and support equipment, emergency control stations,
and means of egress.
The 2022 edition of NFPA 318, Standard for
the Protection of Semiconductor Fabrication Facilities, can help all
stakeholders involved in fire protection, including engineers,
authorities having jurisdiction (AHJs), facility personnel, and
contractors.
Several revisions were made for the 2022 edition of the standard. Those changes include the following:
Tables
for hazardous material quantity limits have been updated to clarify
aggregate limits and allowable increases, as well as to reflect
quantities utilized in fabrication facilities.
A new requirement has been added for cabinets storing pyrophoric liquids to be protected by a fire control system.
New annex material has been added listing the fire control performance requirements for pyrophoric liquid fires.
New language has been added allowing bulk gas purge sources to be used in place of purge cylinders if specific criteria are met.
High-sensitivity smoke detection has been added as an option for silane delivery systems.
PDF质量：高清无水印PDF扫描版（官方正式版、完整版，共计：45P（页），PDF文档大小：22.1MB）
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